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MEMS-Based Deformable Mirrors

DM140A-35-UM01 - Multi-DM 12 x 12 Deformable Mirror with Gold Coating
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Item #DM140A-35-UP01DM140A-35-P01DM140A-35-UM01Kilo-3.5-DMa
Mirror CoatingAluminumProtected SilverGoldAluminum, Protected Silver, or Gold
Actuator Array12 x 12 (140 Active)bØ34 (952 Active)b
Actuator Stroke (Max)c3.5 µm3.5 µm
Actuator Pitch400 µm400 µm
Clear Aperture4.4 mm x 4.4 mmØ13.2 mm
Average Step Sized<1 nm<1 nm
HysteresisNoneNone
Fill Factore>99%>99%
Acceptance Angle±15°±45°
Mechanical Response Time (10% - 90%)<75 μs (~13.3 kHz)<80 μs
Surface Quality<30 nm (RMS)<30 nm (RMS)
Cable Length (from Mirror to Driver)60"2 m
Driver Specifications
Frame Rate (Max)8 kHz34 kHz
Resolution14 Bit14 bit
Driver Dimensions9.0" x 7.0" x 2.5"
(229 mm x 178 mm x 64 mm)
19.0" x 18.5" x 5.25"
(483 mm x 470 mm x 133 mm)
Computer InterfaceUSB 2.0PCIe Card
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